Monocristalline accelerometer and angular rate sensor and methods for making and using same (Accelerometer)
Sweden, Great Britain, Germany, France, USA (SE9203648; EP0738396; WO9412886)
Inventor: Gert Andersson
Abstract
A device is described for measuring force components in single-crystal material consisting of at least one cantilever beam (1, 2, 3, 4) inclined to the plane normal with adherent mass of inertia. The angle to the plane normal of the cantilever beam is achieved through etching the single-crystal material and is defined by the inclination of one of the crystal planes that constitute the beam and that normal. The bending of the cantilever beam inclined to the plane normal occurs principally towards the beam. A method of manufacturing such a device is also described.
Development at IMEGO
Over a number of years we have, through thesis work and customer projects, refined the Quad Slanted Beam accelerometer concept and its electronics. Applications currently targeted are high-end MEMS inertial navigation systems and seismic surveying.
