Method of producing a movable lens structure for a light shaping unit (Beamsteering)
Germany, France, Great Britain, Japan, USA (1558954, 0203266-2, US2006012849)
Inventors: Gert Andersson, Stefan Bengtson, Sverker Hård, Anders Larsson, Fredrik Nikolajeff, Henrik Rödjegård
Abstract
The invention is a method of producing a movable lens structure that forms a lens from a lens material disposed on a carrier of another material (step 58) and forms a micromechanical structure from the carrier (step 60) in whichthe forming of the lens occurs before the forming of the micromechanical structure. With this method, a simplified production method is obtained that simplifies difficult compatibility requirements between the micromechanics and the lens that would otherwise be difficult to satisfy.
Development at IMEGO
Together with Chalmers and Uppsala University, we have manufactured working demonstrators. We used Cytop® the as lens material (56), hot embossing for the lens shaping (58), standard MEMS processing to form the movable stage (60, 62, 64), and finally integrated it with a VCEL (66).
