Publications

Doctoral theses

  • The RGDT – Integration of Micromechanics and Electronics by Plasma Assisted Wafer Bonding
    Anke Sanz-Velasco
    Technical Report no. 417, Department of Microelectronics E, Solid State Electronics Laboratory, Chalmers University of Technology, Sweden, 2002
  • Micromachined Three-Axis Accelerometers and Sensors Readout Electronics
    Henrik rödjegård
    Technical report no. MC2-18, Department of Microelectronics E, Solid State Electronics Laboratory, Chalmers University of Technology, Sweden, 2005