Characterising MEMS sensors is much like trying to find out what is inside a black box without opening the lid. Behavioural models must be confirmed with electrical or optical measurements often under the influence of mechanical stimuli. Imego´s MEMS lab is probably the most well equipted lab in Sweden for this task, with:
- Semi-automatic “Karl Suss PA200-II semiconductor probstation” with optional optical profilometers.
- Scanning laser doppler vibrometer “Polytec PSV-300-F” with vacuum chamber
- Precision shaker “Bouch Labs Model 1000AD”
- Rate table with 3 degrees of freedom “Ideal Aerosmith Model 1601-4-TL” with temerature chamber
- Climate chamber “Heraes-Vötsch VCL 6010”
- Electrical measurement instrumentation (Semiconductor parameter analyser, LCR-meters, Spectrum analysers, Waveform generators, Ocilloscopes, Sources, Amplifiers, etc.)
Calibration services
A prerequisite in achieving high accuracy and long navigation times is calibration of the inertial sensors and determination of their relative orientations. For this purpose, we have an automatic temperature controlled calibration station consisting of a rate table and all the necessary software. During the years Imego have built up an extensive knowledge about calibration and characterization a service that we now also offer for 3 party inertial sensors.